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  • Observing the nucleation phase of atomic layer deposition In situ
    Mack, J. ...
    Source: Chemistry of materials. - ISSN 0897-4756 (Vol. 24, issue 22, 2012, str. 4357-4362)
    Type of material - article, component part
    Publish date - 2012
    Language - english
    COBISS.SI-ID - 26220839
    DOI

source: Chemistry of materials. - ISSN 0897-4756 (Vol. 24, issue 22, 2012, str. 4357-4362)
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