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Micropatterning via laser direct imaging (LDI)
Kokalj, Tadej, 1976- ...
Micropatterning is miniaturization of periodic structures on the surface. The application of micropatterning is rapidly increasing in engineering[sup]1,2, biomaterials engineering[sup]3, cellular ...biology[sup]4,5, biomedicine[sup]6, opto-electronics[sup]7 and other fields. Most traditional method for micropatterning and microstructuring is photolithography which is basis for today's computer microchip production. Similar is soft tithography which is a class of techniques using elastomeric materials, which is chipper for mass production and especially convenient for biomedical applications. In order to find cheaper faster and more accurate methods a number of techniques have been investigated like, direct-write laser (X-ray, ion beam, e-beam) lithography, nanoimprint lithography, drying/evaporative lithography, self-assembly methods, aerosols micropatterning and others. One of alternative methods is Laser Direct Imaging (LDI), a technique where a laser beam is used to image a pattern directly on photoresist-coated surface and thus avoids photomask fabrication. The most obvious difference from the traditional photolithography is the benefit of time and cost savings associated with the creation, use handling and storage of photo tools. Further, this method avoids problems related to mask related defects. The novel LPKF developed ProtoLaser LDI system has a superior 1 [mu]m laser spot size which allows for very small structure resolution. Implementation of acusto-optic deflector allows for extremely fast and accurate writing with positioning accuracy beloww 1 nm. We present several patterns on micron and sub-micron scale for antibiofouling and microfluidics applications created by this novel LPKF LDI system.
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